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| ID: | 149189 |
| Title: | Robotic Automation |
| URL: | http://www.kensingtonlabs.com/ProdLoad1.htm?id=loadport |
| Category: | Business: Security |
| Description: | This report describes a simulation study characterizing the advantages and disadvantages of implementing multiple load ports on metrology equipment in a semiconductor factory. Three methods of automated material handling (AMH) for 300 mm. |